This analytical method is a validated measurement procedure for the determination of the respirable particle fraction of beryllium [7440-41-7] and its inorganic compounds in workplace air after personal or stationary sampling. Sampling is performed by drawing a defined volume of air through a nitrocellulose membrane filter using a suitable flow-regulated pump. After acid digestion, beryllium and its inorganic compounds retained on the filter are analysed using graphite furnace atomic absorption spectrometry. The relative limit of quantification (LOQ) is 0.0013 µg Be/m³ for an air sample volume of 1.2 m³. The mean recoveries for beryllium metal and for beryllium from beryllium oxide are 100.1% and 97.1%, respectively. The concentration-dependent expanded measurement uncertainty is 17% to 19% for the respirable und 14% to 16% for the inhalable particle fraction. This analytical method has been accredited by the accident insurance companies for the detection of substances in workplace air that are carcinogenic, mutagenic or toxic to reproduction. This method has been tested and recommended for the determination of beryllium and its inorganic compounds in work areas by the German Social Accident Insurance (DGUV).